Test method for the content of impurities in high purity quartz used for silicon material—Inductively coupled plasma atomic emission spectrometry method
基本信息
标准号:
YS/T 1164-2016
名称:
硅材料用高纯石英制品中杂质含量的测定 电感耦合等离子体发射光谱法
英文名称:
Test method for the content of impurities in high purity quartz used for silicon material—Inductively coupled plasma atomic emission spectrometry method