Surface chemical analysis—Depth profiling—Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
基本信息
标准号:
GB/T 34326-2017
名称:
表面化学分析 深度剖析 AES和XPS深度剖析时离子束对准方法及其束流或束流密度测量方法
英文名称:
Surface chemical analysis—Depth profiling—Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS